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  • 5-25msec pulse SS
  • Long pulse SS
  • Solar Simulator
  • High Fidelity Spectral Matching S S
  • SS with focusing optics
  • SS with Env Chamber
  • Optional Equipments

  • Magic Mirror
  • High Mag MM
  • Automated inspection
  • Slip finder

  • HYPERCURE200
  • Mask Aligner System
  • UV Exposure Light sources
  • Uniform UV Light Source
  • Polarized UV beam exposure system

  • Xenon Light Source
  • Power Supplies

  • Optical Components
  • Lamps

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Yamashita Denso Corporation >High Mag MM


 

Outline

 

This model gives higher magnification than conventional YIS Series Magic Mirror and offers 10mm Field of View on a display monitor.

It has been used to inspect SLIP LINE detection after EPI process or SIMOX process. It is also can be applicable to inspect damages on a surface of hard disk or some optical components.

Our field test indicate sensitivity of YIS-50HM is equivalent that can be obtained by Nomarsky Microscope operating at 50X.

 

 
For details, please contact us at: HOLOGENIX or YDC
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